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Low-energy BO and BO2 emission from H2BO3 sputtered in a low-pressure high-frequency SNMS plasma

✍ Scribed by Holger Jenett; Xingtao Ai; Vasile-Dan Hodoroaba; Ione Iga; Lee Mu Tao


Book ID
114171353
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
761 KB
Volume
155
Category
Article
ISSN
0168-583X

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