Low dose and high resolution measurements using two-dimensional position sensitive detector with medium energy ion scaterring: T Koshikawa, H Nakamura, T Uchiyama, T Katayama, K Takagi, H Yamakawa, S Matsuura and E Inuzuka, Electro- Communication Univ, 18-8 Hatsu, Neyagawa, Osaka 572 Japan; ULVAC Corporation, Hagisono, Chigasaki 253, Japan; Hamamatsu Photonics K K, Sunayama, Hamamatsu 430, Japan

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 187 KB
• Volume: 41
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)94092-5