Low-Dielectric, Nanoporous Organosilicate Films Prepared via Inorganic/Organic Polymer Hybrid Templates

✍ Scribed by Nguyen, Cattien V.; Carter, Kenneth R.; Hawker, Craig J.; Hedrick, James L.; Jaffe, Richard L.; Miller, Robert D.; Remenar, Julius F.; Rhee, Hee-Woo; Rice, Philip M.; Toney, Michael F.; Trollsås, Mikael; Yoon, Do Y.

• Book ID: 126397234
• Publisher: American Chemical Society
• Year: 1999
• Tongue: English
• Weight: 156 KB
• Volume: 11
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm990114d