✦ LIBER ✦
Low defect density amorphous silicon germanium alloy (1.5 eV) deposited at high growth rate under helium dilution in RF-PECVD method
✍ Scribed by Sukti Hazra; A.R. Middya; Swati Ray
- Book ID
- 117148125
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 549 KB
- Volume
- 211
- Category
- Article
- ISSN
- 0022-3093
No coin nor oath required. For personal study only.