✦ LIBER ✦

Low cost molecular ion implantation equipment

✍ Scribed by J.C. Muller; P. Siffert

Book ID: 103304477
Publisher: Elsevier Science
Year: 1981
Weight: 312 KB
Volume: 189
Category: Article
ISSN: 0167-5087
DOI: 10.1016/0029-554x(81)90147-6

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