Low cost method for hot embossing of microstructures on PMMA by SU-8 masters

✍ Scribed by Shamsi, Alireza; Amiri, Ali; Heydari, Payam; Hajghasem, Hasan; Mohtashamifar, Mansour; Esfandiari, Mehrnaz

• Book ID: 121589074
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 453 KB
• Volume: 20
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-013-2000-z