Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement

✍ Scribed by Shankar Kumar Selvaraja; Wim Bogaerts; Dries Van Thourhout

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 693 KB
• Volume: 284
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/j.optcom.2010.12.086