✦ LIBER ✦
Long-travel electrothermally driven resonant cantilever microactuators
✍ Scribed by Syms, R R A
- Book ID
- 124164474
- Publisher
- Institute of Physics
- Year
- 2002
- Tongue
- English
- Weight
- 519 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0960-1317
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