Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation

✍ Scribed by Choi, B.K.; Fleetwood, D.M.; Schrimpf, R.D.; Massengill, L.W.; Galloway, K.F.; Shaneyfelt, M.R.; Meisenheimer, T.L.; Dodd, P.E.; Schwank, J.R.; Lee, Y.M.; John, R.S.; Lucovsky, G.

• Book ID: 120209693
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 623 KB
• Volume: 49
• Category: Article
• ISSN: 0018-9499
• DOI: 10.1109/TNS.2002.805389