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Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets

✍ Scribed by Ichiki, Takanori

Book ID: 120491008
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 671 KB
Volume: 95
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1630375

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