Local stress distribution in thermally-grown-oxide layer by near-field optical microscopy

✍ Scribed by T. Tomimatsu; S.J. Zhu; Y. Kagawa

• Book ID: 113894754
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 393 KB
• Volume: 50
• Category: Article
• ISSN: 1359-6462
• DOI: 10.1016/j.scriptamat.2003.09.005