✦ LIBER ✦
Local stress determination in shallow trench insulator structures with one-side and two-sides pad-SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization
✍ Scribed by Liao, Milton M. H.
- Book ID
- 111961460
- Publisher
- American Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 517 KB
- Volume
- 105
- Category
- Article
- ISSN
- 0021-8979
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