Local strain measurement in a strain-engineered complementary metal-oxide-semiconductor device by geometrical phase analysis in the transmission electron microscope

✍ Scribed by Chung, Jayhoon; Lian, Guoda; Rabenberg, Lew

• Book ID: 126797661
• Publisher: American Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 442 KB
• Volume: 93
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2970050