Microstructures of diamond formed by pla
✍
J.L. Kaae; P.K. Gantzel; J. Chin; W.P. West
📂
Article
📅
1990
🏛
Elsevier Science
🌐
English
⚖ 92 KB
We have investi ated the effects of reactant residence time on the properties of microwav+a88isted CV % diamond films. Using a constant process pressure of 40 Torr and gas composition of 1% CHb in Hr? the total gas flow rate was adjusted from 25 to 800 seem. For OUT reactor, this correspond8 to res