Local etching of copper films by the Scanning Electrochemical Microscope in the feedback mode: A theoretical and experimental investigation

✍ Scribed by Renaud Cornut; Sandra Nunige; Christine Lefrou; Frédéric Kanoufi

• Book ID: 113596190
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 936 KB
• Volume: 56
• Category: Article
• ISSN: 0013-4686
• DOI: 10.1016/j.electacta.2011.03.088