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Local Doping of Silicon Using Nanoimprint Lithography and Molecular Monolayers

✍ Scribed by W. Pim Voorthuijzen; M. Deniz Yilmaz; Wouter J. M. Naber; Jurriaan Huskens; Wilfred G. van der Wiel


Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
571 KB
Volume
23
Category
Article
ISSN
0935-9648

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