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Lithography by tapping-mode atomic force microscopy with electrostatic force modulation

✍ Scribed by Kim, B.I.; Pi, U.H.; Khim, Z.G.; Yoon, S.

Book ID: 113035231
Publisher: Springer
Year: 1998
Tongue: English
Weight: 288 KB
Volume: 66
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s003390051108

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