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Lithographic results of electron beam photoresists prepared by living free radical polymerization

✍ Scribed by M. Chiara Bignozzi; Christopher K. Ober; Anthony J. Novembre; Chester Knurek

Book ID: 106002585
Publisher: Springer
Year: 1999
Tongue: English
Weight: 622 KB
Volume: 43
Category: Article
ISSN: 0170-0839
DOI: 10.1007/s002890050538

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