Lithographic properties of chemically amplified resists based on copolymers of 4-tert-butoxycarbonyloxystyrene (TBS) and sulfur dioxide (SO2)

✍ Scribed by A.E. Novembre; J.E. Hanson; J.M. Kometani; W.W. Tai; O. Nalamasu; G.N. Taylor; E. Reichmanis; L.F. Thompson; D.N. Tomes

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 280 KB
• Volume: 17
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(92)90051-r