Laser-scanning lithography (LSL) for the
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Jordan S. Miller; Mathilde I. BΓ©thencourt; Mariah Hahn; T. Randall Lee; Jennifer
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Article
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2006
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John Wiley and Sons
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English
β 364 KB
π 2 views
## Abstract We report the development of laserβscanning lithography (LSL), which employs a laserβscanning confocal microscope to pattern photoresists that can be utilized, for example, in the fabrication of masters for use in soft lithography. This convenient technique provides even exposure across