✦ LIBER ✦
Lithographic evaluation of a new wet silylation process using safe solvents and the commercial photoresist AZ 5214ETM
✍ Scribed by E. Gogolides; K.H. Baik; K. Yannakopoulou; L. Van den hove; M. Hatzakis
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 335 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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