✦ LIBER ✦
Linking EUV lithography line edge roughness and 16 nm NAND memory performance
✍ Scribed by Alessandro Vaglio Pret; Pavel Poliakov; Roel Gronheid; Pieter Blomme; Miguel Miranda Corbalan; Wim Dehaene; Diederik Verkest; Jan Van Houdt; Davide Bianchi
- Book ID
- 116741939
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 880 KB
- Volume
- 98
- Category
- Article
- ISSN
- 0167-9317
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