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Linewidth measurement with an optical microscope: the effect of operating conditions on the image profile

✍ Scribed by Nyyssonen, D.

Book ID: 115325638
Publisher: The Optical Society
Year: 1977
Tongue: English
Weight: 809 KB
Volume: 16
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.16.002223

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