✦ LIBER ✦
Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels [dimension measurement]
✍ Scribed by Tanaka, M.; Yamagami, T.; Nakayama, K.
- Book ID
- 114542474
- Publisher
- IEEE
- Year
- 1989
- Tongue
- English
- Weight
- 360 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0018-9456
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