LiNbO3 thin film for A1 mode of Lamb wave resonators

✍ Scribed by Kadota, Michio ;Ogami, Takashi ;Yamamoto, Kansho ;Tochishita, Hikari

• Book ID: 105365936
• Publisher: John Wiley and Sons
• Year: 2011
• Tongue: English
• Weight: 352 KB
• Volume: 208
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.201000060

✦ Synopsis

Abstract

Currently, a high frequency device more than 3 GHz is required. High frequency resonators with resonant frequencies of 4.5 and 6.3 GHz were fabricated by utilizing an anti‐symmetric first mode (A~1~) of a Lamb wave having a high velocity consisting of a thin LiNbO~3~ film deposited by a chemical vapor deposition (CVD) system. By measuring polarities of their LiNbO~3~ films, it was clarified that the thinner film had a large mixture of +c and −c domains, and the occupation ratio of main polarity influenced their frequency characteristics.