Limits of complex impedance spectroscopy in ionic conductor thin film measurements
β Scribed by Y. Jin; P. Dzwonkowski; J-Y. Emery; M. Eddrief; I. Riess
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 312 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0167-2738
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π SIMILAR VOLUMES
Thin film capacitors with BaTiO 3 as dielectric and RuO 2 as electrode material have been prepared by rf-magnetron sputtering at temperatures up to 750 1C and under various oxygen partial pressures. They have been analyzed by complex impedance spectroscopy in the temperature range 20-200 1C. At abou
## Abstract A procedure to include conductor loss in interdigital capacitor based dielectric constant measurements is proposed. The effect of conductor loss and contact resistance can be regarded as a series resistor connected to the interdigital capacitor. If the thickness of the conductor film is