Limitations on the performance of charged particle beams in microlithography
โ Scribed by Rainer Spehr
- Book ID
- 107920278
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 441 KB
- Volume
- 3
- Category
- Article
- ISSN
- 0167-9317
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๐ SIMILAR VOLUMES
Processes underlying the formation of the essential nonuniform structures in charged-particle beams from the smooth initial distributions are examined within the framework of the gas dynamic approach. Only electrostatic forces and influence of the initial conditions are taken into account. Condition
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