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Limit of gate oxide thickness scaling in MOSFETs due to apparent threshold voltage fluctuation induced by tunnel leakage current

✍ Scribed by Koh, M.; Mizubayashi, W.; Iwamoto, K.; Murakami, H.; Ono, T.; Tsuno, M.; Mihara, T.; Shibahara, K.; Miyazaki, S.; Hirose, M.


Book ID
114538561
Publisher
IEEE
Year
2001
Tongue
English
Weight
224 KB
Volume
48
Category
Article
ISSN
0018-9383

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