LIGA process – micromachining technique using synchrotron radiation lithography – and some industrial applications

✍ Scribed by Yoshihiro Hirata

• Book ID: 114166969
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 232 KB
• Volume: 208
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(03)00632-3