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Life cycle analysis of silane recycling in amorphous silicon-based solar photovoltaic manufacturing

✍ Scribed by M.A. Kreiger; D.R. Shonnard; J.M. Pearce


Book ID
119357581
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
494 KB
Volume
70
Category
Article
ISSN
0921-3449

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Hydrogenated amorphous silicon films (a-Si:H) have been deposited by r.f. glow discharge of silane (Sill 4) and hydrogen (H 2) gas mixture. The hydrogen concentration in the gas mixture and the applied r.f. power density have been varied. The initial photoconductivity (crp), photosensitivity (%/~d),