✦ LIBER ✦
Less than 0.1 μm linewidth fabrication by visible light using super-resolution near-field structure
✍ Scribed by M. Kuwahara; T. Nakano; C. Mihalcea; T. Shima; J.H. Kim; J. Tominaga; N. Atoda
- Book ID
- 114155263
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 769 KB
- Volume
- 57-58
- Category
- Article
- ISSN
- 0167-9317
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