[Lecture Notes in Computer Science] Algorithms and Architectures for Parallel Processing Volume 7439 || Optimization of a Short-Range Proximity Effect Correction Algorithm in E-Beam Lithography Using GPGPUs

✍ Scribed by Xiang, Yang; Stojmenovic, Ivan; Apduhan, Bernady O.; Wang, Guojun; Nakano, Koji; Zomaya, Albert

• Book ID: 118257894
• Publisher: Springer Berlin Heidelberg
• Year: 2012
• Weight: 274 KB
• Category: Article
• ISBN: 3642330789
• DOI: 10.1007/978-3-642-33078-0_4