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[Lecture Notes in Computer Science] Advances in Neural Networks - ISNN 2010 Volume 6064 || Endpoint Detection of SiO2 Plasma Etching Using Expanded Hidden Markov Model

✍ Scribed by Zhang, Liqing; Lu, Bao-Liang; Kwok, James

Book ID: 121013001
Publisher: Springer Berlin Heidelberg
Year: 2010
Weight: 789 KB
Category: Article
ISBN: 3642133185
DOI: 10.1007/978-3-642-13318-3_58

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