Leakage current and paramagnetic defects in SiCN dielectrics for copper diffusion barriers

✍ Scribed by Kiyoteru Kobayashi; Hisashi Yokoyama; Masato Endoh

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 427 KB
• Volume: 254
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.02.144