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Leakage and Reliability Characteristics of Lead Zirconate Titanate Thin-Film Capacitors

✍ Scribed by Husam N. Al-Shareef; Duane Dimos

Book ID
110089991
Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
202 KB
Volume
80
Category
Article
ISSN
0002-7820

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We successfully fabricated lead zirconate titanate (PZT) films with film thickness of 70 nm using a modified solution combined with lead titanate (PTO) seed layer. Throughout various approaches, we have found that the microstructure of PZT film plays an important role in determining the hysteretic p