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Layering processes and their applications in silicon microelectronics

✍ Scribed by Pradip K. Roy; Sailesh M. Merchant; Arun K. Nanda

Publisher: Institute of Electrical and Electronics Engineers
Year: 2002
Tongue: English
Weight: 228 KB
Volume: 2
Category: Article
ISSN: 1089-7089
DOI: 10.1002/bltj.2058

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