✦ LIBER ✦
Layered imaging for subsurface features of integrated circuits by photoacoustic microcospy : CHEN LI, ZHANG SHU-YI (Inst. of Acoust., Nanjing Univ., China) Acta Acust. (China), vol. 13, no. 3, pp. 201–208 (May 1988). In Chinese
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 98 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2692
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