✦ LIBER ✦
Layer splitting in Si by H+He ion co-implantation: Channeling effect limitation at low energy
✍ Scribed by C Qian; B Terreault; S.C Gujrathi
- Book ID
- 114164486
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 271 KB
- Volume
- 175-177
- Category
- Article
- ISSN
- 0168-583X
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