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Layer-by-layer sputtering and epitaxy of Si(100)

✍ Scribed by Bedrossian, P.; Houston, J. E.; Tsao, J. Y.; Chason, E.; Picraux, S. T.

Book ID: 121733449
Publisher: The American Physical Society
Year: 1991
Tongue: English
Weight: 152 KB
Volume: 67
Category: Article
ISSN: 0031-9007
DOI: 10.1103/PhysRevLett.67.124

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