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Layer-by-layer analysis of structures containing δ-layers by secondary ion mass spectrometry taking into account the TOF.SIMS-5 depth resolution function

✍ Scribed by Drozdov, Yu. N.; Drozdov, M. N.; Novikov, A. V.; Yunin, P. A.; Yurasov, D. V.


Book ID
119883624
Publisher
Pleiades Publishing
Year
2012
Tongue
English
Weight
160 KB
Volume
6
Category
Article
ISSN
1027-4510

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