✦ LIBER ✦
Lattice parameter measurement of sub-micron device structures in compound semiconductors via convergent-beam electron diffraction
✍ Scribed by Twigg, M.E.; Chu, S.N.G.; Joy, D.C.; Maher, D.M.; Macrander, A.T.; Chin, A.K.
- Book ID
- 122905356
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 646 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0167-577X
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