✦ LIBER ✦
Lattice location and ionization induced annealing of self-interstitials in boron-implanted silicon by Rutherford backscattering.
- Publisher
- Elsevier Science
- Year
- 1978
- Tongue
- English
- Weight
- 169 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0042-207X
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