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Lattice distortion in thin films of IVB metal (Ti, Zr, Hr) nitrides

✍ Scribed by I. Goldfarb; J. Pelleg; L. Zevin; N. Croitoru


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
589 KB
Volume
200
Category
Article
ISSN
0040-6090

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