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Lattice distortion in dry-etched Si/SiGe quantum dot array studied by 2D reciprocal space mapping using synchrotron X-ray diffraction

✍ Scribed by W.-X Ni; J Birch; Y.S Tang; K.B Joelsson; C Sotomayor-Torres; Å Kvick; G.V Hansson


Book ID
108388977
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
321 KB
Volume
294
Category
Article
ISSN
0040-6090

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