An Auger sputter profiling study of nitr
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B. D. Barton; L. E. Pope; T. N. Wittberg
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Article
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1990
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John Wiley and Sons
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English
β 549 KB
## Abstract Samples of two titanium alloys, Tiβ6Alβ4V and Tiβ15Vβ3Crβ3Snβ3Al, were ion implanted with a combination of nitrogen (N^+^) and oxygen (O^+^). For each alloy, implantation parameters were chosen to give implanted nitrogen concentrations of βΌ10 or 50 at.%, from a depth of 100 nm to a dept