Laterally resolved crystalline damage in single-point-diamond-turned silicon

✍ Scribed by C. Jeynes; K.E. Puttick; L.C. Whitmore; K. Gärtner; A.E. Gee; D.K. Millen; R.P. Webb; R.M.A. Peel; B.J. Sealy

• Book ID: 113287471
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 446 KB
• Volume: 118
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(95)01464-0