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Lateral straggling and its influence on lateral diffusion in implantation with a focused ion beam

✍ Scribed by R. Batabyal; J.C. Mahato; A. Roy; S. Roy; L. Bischoff; B.N. Dev


Book ID
108225812
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
745 KB
Volume
269
Category
Article
ISSN
0168-583X

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