Lateral scanning confocal microscopy for the determination of in-plane displacements of microelectromechanical systems devices

✍ Scribed by Li, Zhi; Herrmann, Konrad; Pohlenz, Frank

• Book ID: 115429717
• Publisher: Optical Society of America
• Year: 2007
• Tongue: English
• Weight: 307 KB
• Volume: 32
• Category: Article
• ISSN: 0146-9592
• DOI: 10.1364/OL.32.001743