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Lateral resolution in the near field and far field phase images of π-phaseshifting structures

✍ Scribed by Michael Totzeck; Marco A. Krumbügel

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 754 KB
Volume: 112
Category: Article
ISSN: 0030-4018
DOI: 10.1016/0030-4018(94)00451-x

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