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Lateral inhomogeneous boron segregation during silicon thin film growth with molecular beam epitaxy

✍ Scribed by D. Krüger; G. Lippert; R. Kurps; H.J. Osten

Book ID: 103168738
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 784 KB
Volume: 135
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(94)90747-1

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